

| 产品名称 | 直线电机模组HPL-170LM | |||
| 电机参数 | 符号 | 单位 | 数值 | |
| 行程 | Travel | mm | 200 | |
| 定位精度 | 标准 | Standard | μm | ±8.5 |
| 线性误差修正 | Facter | μm | ±2 | |
| 分辨率 | Resolution | μm | 0.1 | |
| 双向重复定位精度 | Bi-Directional | μm | ±0.75 | |
| 直线度 | Straightness | μm | ±4.5 | |
| 平面度 | Flatness | μm | ±4.5 | |
| 俯仰角误差 | Pitch | arc sec | 10 | |
| 横滚角误差 | Roll | arc sec | 10 | |
| 偏航角误差 | Yaw | arc sec | 12 | |
| 峰值速度 (No Load ) | Maximum Speed | mm/s | 2000 | |
| 峰值加速度(No Load) | Maximum Acceleration | g | 3 | |
| 峰值连续推力 | Maximum Continuous Force | N | 60 | |
| 负载能力 | 水平 | Horizontal | Kg | 45 |
| 侧置 | Side | Kg | 45 | |
| 运动台质量 | Moving Mass | Kg | 2.7 | |
| 平台质量 | Stage Mass | Kg | 11.6 | |
| 材料 | Aluminum,7075 | |||