

| 产品名称 | 直线电机模组REI130LM-60 | |||
| 电机参数 | 符号 | 单位 | 数值 | |
| 行程 | Travel | mm | 100 | |
| 定位精度(1) | 标准 | Standard | μm | ±3.5 |
| 线性误差修正 | Facter | μm | ±1.5 | |
| 分辨率 | Resolution | μm | 1 | |
| 双向重复定位精度(1) | Bi-Directional | nm | ±300 | |
| 直线度(1) | Straightness | μm | ±3 | |
| 平面度(1) | Flatness | μm | ±3 | |
| 俯仰角误差(1) | Pitch | arc sec | 15 | |
| 横滚角误差 | Roll | arc sec | 15 | |
| 偏航角误差(1) | Yaw | arc sec | 10 | |
| 峰值速度(3)(No Load ) | Maximum Speed | mm/s | 750 | |
| 峰值加速度(3)(No Load ) | Maximum Acceleration | g | 4(No Load) | |
| 峰值连续推力 | Maximum Continuous Force | N | 23.5 | |
| 负载能力(2) | 水平 | Horizontal | Kg | 12 |
| 侧置 | Side | Kg | 10 | |
| 运动台质量 | Moving Mass | Kg | 2 | |
| 平台质量 | Stage Mass | Kg | 4.1 | |
| 材料 | Aluminum,7075 | |||